The Electrum Laboratory is located in Kista north of Stockholm city. The cleanroom facilities covering a total area of more than 1300 m2 is a common resource for research, development, production and education of semiconductor technology and devices. The Electrum laboratory is jointly operated by Acreo and The Royal Institute of Technology (KTH).
To maintain an adequate quality level for our processes the laboratory department, named Quality Laboratory Acreo (QLA), was organised to take care of the equipment and preserve high level of processes.
QLA is a first rate laboratory to serve a multi-user environment with focus on component development and fabrication. It covers academic as well as industrial oriented R&D. Major users of the Laboratory are, beside Acreo itself and our industrial partners, the Departments of Electronics and of Signals, Sensors and Systems at KTH.
This is one of Europe’s most advanced laboratories for component development. Our unique position is related to wide process capability, including several different component processes running continuously in the laboratory. We offer process lines for the fabricattion of devices: beginning with traditional Si processing (MOS device process), through micromachining in silicon (surface and bulk micormachining) to SiC and III-V process technology (SiC sensors, GaAs sensors, InP lasers).
QLA is not only pure front-end process facility, we have also back-end process capability like high precision dicing, flip chip bonding, wire bonding, and access to various analytical instruments like Tencor Profilometer, Atomic Force Microscope, JEOL Scanning Electron Microscope, X-Ray diffraction tools etc.
To give some examples of process possibilities in QLA the schematic flow for different processes is presented here. Processes are divided very roughly in four general steps and examples of equipment used in every step is also listed.