Wafer-scale nanostructure fabrication using MOVPE self-assembly and nano imprint lithography for photonic devices,

Author: 
Wang, Q. , Hoglund , L., Almqvist, S. , Noharet, B. , Kaplan, W. , and Andersson, J. Y.
Type of publication: 
Conference item
Year: 
2007
Published in: 
Proceedings of the OSA topic conference on Nanophotonics, p.24 (2007).