Toward 17µm pitch heterogeneously integrated Si/SiGe quantum well bolometer focal plane arrays

Author: 
Ericsson, P.; Fischer, A.C.; Forsberg, F.; Roxhed, N.; Samel, B.; Savage, S.; Stemme, G.; Wissmar, S.; Öberg. O.; Niklaus. F.
Type of publication: 
Conference item
Year: 
2011
Publication: 
PDF icon publ2011-towards-17um-pitch-perericsson.pdf
Published in: 
SPIE, Infrared Technology and Applications XXXVII