Thin Film encapsulation of Acceleration Sensors Using Polysilicon Sacrificial Layers

Author: 
H.Stahl, A.Hoechst, F.Fischer, L.Metzger, R.Reichenbach, F.Laermer, S.Kronmueller, K.Breitschwerdt, R.Gunn, S.Watcham, C.Rusu, A.Witvrouw
Type of publication: 
Conference item
Year: 
2013
Published in: 
Proc. TRANSDUCERS03 - 12th Int. Conf. on Solid State Sensors, Actuators and Microsystems, Boston, June 8-12, 2003.