Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process

Author: 
A. Witvrouw, C. Rusu, H. Jansen and R. Gunn
Type of publication: 
Journal article
Year: 
2013
Published in: 
Microsystem Technologies, Vol 10, No 5, pp 364 - 371, August 2004