Planarization of epitaxial SiC trench structures by ICP plasma etching

Author: 
Zhang A., Reshanov S. A., Schöner A., Kaplan W., Kwietniewski N., Lim J.-K., Bakowski M.
Type of publication: 
Conference item
Year: 
2014
Published in: 
2014 ECSCRM conference, Grenoble, France, 21-25 September, 2014