Novel High Growth Rate Processes for Depositing Poly-SiGe Structural Layers at CMOS Compatible Temperatures

Author: 
A. Mehta, M. Gromova, C. Rusu, K. Baert, A. Witvrouw
Type of publication: 
Conference item
Year: 
2013
Published in: 
Proc. IEEE Conference on MEMS, Maastricht, Netherlands, 25-29 January 2004, pp.721-724