Millimeter-Wave Tapered Slot Antenna for Integration on Micromachined Low Resistivity silicon Substrates

Cheng, S., Rydberg, A., Hallbjorner, P., Pettersson, L., Salter, M., and Platt, D.
Type of publication: 
Conference item

This paper presents a millimeter-wave tapered slot antenna (TSA) for integration on a 325 mum thick low resistivity silicon substrate, using micromachining techniques. By suspending the radiator on a 5.5 mm x 1.5 mm large benzocyclobutene (BCB) membrane, good antenna performance is achieved at millimeter-wave frequencies. Port impedance and radiation patterns are studied numerically and experimentally. Measurements indicate that this antenna features good impedance matching (S11 < -10 dB) and a gain of > 4.6 dBi from 75 to 110 GHz. The measured results are in good agreement with numerical simulations.

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IEEE International Workshop on Antenna Technology, iWAT, Santa Monica, CA, March 2009.