Millimeter-Wave Tapered Slot Antenna for Integration on Micromachined Low Resistivity silicon Substrates

Author: 
Cheng, S., Rydberg, A., Hallbjorner, P., Pettersson, L., Salter, M., and Platt, D.
Type of publication: 
Conference item
Abstract: 

This paper presents a millimeter-wave tapered slot antenna (TSA) for integration on a 325 mum thick low resistivity silicon substrate, using micromachining techniques. By suspending the radiator on a 5.5 mm x 1.5 mm large benzocyclobutene (BCB) membrane, good antenna performance is achieved at millimeter-wave frequencies. Port impedance and radiation patterns are studied numerically and experimentally. Measurements indicate that this antenna features good impedance matching (S11 < -10 dB) and a gain of > 4.6 dBi from 75 to 110 GHz. The measured results are in good agreement with numerical simulations.

Year: 
2009
Official URL: 
http://ieeexplore.ieee.org/xpl/login.jsp?tp=&arnumber=4906949&url=http%3A//ieeex...
Published in: 
IEEE International Workshop on Antenna Technology, iWAT, Santa Monica, CA, March 2009.