Micro pinball game demonstrating an easy MEMS transfer process using room temperature plasma bonding,

Author: 
M. Bring, A. Sanz-Velasco, H. Rodjegard, and P. Enoksson
Type of publication: 
Journal article
Year: 
2013
Published in: 
Journal of Micromechanics and Microengineering, v 13, n 4, pp. S51-66, July 2003