MEMS Sensor For In Situ Tem Atomic Force Microscopy

Author: 
A. Nafari, D. Karlen, C. Rusu, K. Svensson, H. Olin, P. Enoksson
Type of publication: 
Journal article
Year: 
2013
Published in: 
IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), vol.17, p.328-333, 2008