Interconnects in Micro Systems

Author: 
Cristina Rusu, Katrin Persson, Britta Ottosson, Dag Billger, Henrik Rödjegård, Daniel Käck, Lisa Palmquist, Gert I Andersson
Type of publication: 
Conference item
Year: 
2013
Published in: 
The 16th European Workshop on MicroMechanics, the MME’05, (Göteborg, Sweden, 2005), pp. 123-126.