High-performance long wave infrared bolometer fabricated by wafer bonding

Author: 
Lapadatu, A., Kittilsland, G., Elfving, A., Hohler, E., Kvisterøy, T., Bakke, T.,Ericsson, P.
Type of publication: 
Conference item
Year: 
2010
Published in: 
Infrared Technology and Applications XXXVI, Proc. of SPIE Vol. 7660, 766016