Fabrication and Characterization of 3C-SiC-Based MOSFETs

Author: 
Schöner , A. , Krieger, M. , Pensl, G. , Abe, M. , Nagasawa, H.
Type of publication: 
Journal article
Year: 
2006
Published in: 
CHEMICAL VAPOR DEPOSITION 12 (8-9): 523-530 AUG 2006