Effect of deposition parameters on the stress gradient of CVD and PECVD poly-SiGe for MEMS applications

Author: 
T. van der Donck, J. Proost , C. Rusu, K. Baert, C. Van Hoof, J.-P. Celis and A. Witvrouw
Type of publication: 
Conference item
Year: 
2013
Published in: 
Proc. of SPIE Vol. 5342 Micromachining and Microfabrication Process Technology IX; , pp8-18, 2004.