Double sided bulk micromachining of SOI films using room temperature oxygen plasma assisted bonding,

Author: 
A. Sanz-Velasco, H. Rodjegard, and G. I. Andersson
Type of publication: 
Conference item
Year: 
2013
Published in: 
Proceedings of the SPIE - The International Society for Optical Engineering, v 4755, 2002, pp. 648-659.