Double sided bulk micromachining of SOI films using room temperature oxygen plasma assisted bonding

Author: 
A. Sanz-Velasco, H. Rödjegård and G. I. Andersson
Type of publication: 
Journal article
Year: 
2013
Published in: 
Journal of Micromechanics and Microengineering, Vol. 12 pp. 786-794, 2002