Deep defects in 3C-SiC generated by H+- and He+-implantation or by irradiation with high-energy electrons

Author: 
Weidner, M., Trapaidze, L.,  Pensl, G., Reshanov, S.A.,  Schöner, A., Itoh, H., Ohshima, T., Kimoto, T.
Type of publication: 
Journal article
Year: 
2010
Published in: 
Materials Science Forum 645-648 (2010), 439-442.