Comparative study of thermal oxides and post-oxidized deposited oxides on n-type free standing 3C-SiC

Author: 
Esteve, R., Schöner, A.,  Reshanov, S. A., and Zetterling, C.-M.  
Type of publication: 
Journal article
Year: 
2010
Published in: 
Materials Science Forum 645-648 (2010) 829-832.