Capacitive slanted-beam three-axis accelerometer, Part 1: Modelling and design

Author: 
Rödjegård, H., Andersson, G. I., Löfgren, M., Rusu, C., Billger, D.
Type of publication: 
Journal article
Year: 
2005
Published in: 
Journal of Micromechanics and Microengineering 15, p. 1989-1996