C. Rusu, S. Sedky, B. Parmentier, A. Verbist, O. Richard, B. Brijs, L. Geenen, A. Witvrouw

Author: 
New low-stress PECVD Poly-SiGe Layers for MEMS
Type of publication: 
Journal article
Year: 
2013
Published in: 
Journal of Microelectromechanical Systems, 12(6), pp.816-825, 2003