Bulk micromachining of SOI wafers using double sided lithography and anisotropic wet etching

Author: 
H. Rödjegård, G. I. Andersson
Type of publication: 
Conference item
Year: 
2013
Published in: 
Proceedings of SPIE - Micromachining and Microfabrication Process Technology VI , vol. 4174, pp. 485-495. Santa Clara, California 2000