Bulk micromachined angular rate sensor based on the “Butterfly”-gyro structure

Author: 
Hedenstierna, N., et. al.
Type of publication: 
Conference item
Abstract: 

The principle of the butterfly-gyro was first demonstrated with a large anisotropically etched structure in bulk silicon. Now the same principle has been used to develop a much smaller structure (9.6 mm2). The new sensor chip is ICP-etched in bulk silicon and anodically bonded to form a triple stack (glass/Si/glass) structure. Together with an ASIC the sensor typically shows a noise level of 0.3 deg/s over 50 Hz bandwidth and a zero-rate offset (ZRO) less than 50 deg/s.

Year: 
2001
ISBN: 
0-7803-5998-4
Location: 
Interlaken
Switzerland
CH
Published in: 
The 14th IEEE International Conference on Micro Electro Mechanical Systems, pp. 178-181.