Boron at Si/SiO2 interface in SOI wafers and consequences for piezoresistive MEMS devices

Author: 
A. Nafari, D. Karlen, Cristina Rusu, K. Svensson, P. Enoksson
Type of publication: 
Conference item
Year: 
2013
Published in: 
Proceeding of MicroMechanics Europe, 28-30 Sept 2008, Aachen, Germany