A novel technique for integration of optical elements onto silicon

Author: 
K. Hedsten, A. Magnusson, J. Melin, H. Rödjegård, G. Andersson, J. Bengtsson, P. Enoksson, F. Nikolajeff and R. Nilsson
Type of publication: 
Conference item
Year: 
2013
Published in: 
Micro Structure Workshop (MSW’04), March 30-31, 2004, Ystad, Sweden.