A novel silicon bulk gyroscope

Author: 
Andersson, G.I., Hedenstierna,, N., Svensson, P. and Pettersson, H.
Type of publication: 
Conference item
Abstract: 

This paper reports on a novel silicon bulk gyroscope for automotive applications. The novel gyroscope structure that we have called the “Butterfly-gyro” has a gyroscopic scale factor comparable to that of tuning fork gyros. The gyro is simple to manufacture with single sided electrostatic exitation and capacitive detection. As the two masses vibrate in anti-phase the offset is smaller and the gyro is less sensitive to linear and angular vibrations. The manufactured prototypes operate at atmospheric pressure and show excellent linearity. The best samples have a resolution of approximately 0.1 °/sec at 50 Hz bandwidth.

Year: 
1999
Location: 
Sendai
Japan
JP
Published in: 
Transducers ’99 , 1999 International Conference on Solid-State sensors and Actuators, Volume II, pp. 902-905