A monolithic Three-Axis Accelerometer with Symmetric Properties,

Author: 
H. Rödjegård and G. Andersson,
Type of publication: 
Conference item
Year: 
2013
Published in: 
The 11th Int. Conf. On Solid-State Sensors and Actuators, Transducers '01/ Eurosensors XV, Vol. 1, pp. 442-445, Munich, Germany, 2001