A monolithic three-axial SOI-accelerometer with uniform sensitivity

Author: 
H. Rödjegård, C. Johansson, P. Enoksson, and G. I. Andersson
Type of publication: 
Conference item
Year: 
2013
Published in: 
Eurosensors XVIII Proceedings, Paper B2.5, September 13-15, 2004, Rome, Italy