A Monocrystalline Accelerometer and Angular Rate Sensor and Methods for Making and Using the Same

Gert Andersson
Type of publication: 
Published in: 
Patent No. SE9203648-2, Germany Patent No. 69328381.5-08, United States Patent No. 5,723,790, Patent in France and United Kingdom Patent No. 738396, Patent pending in Japan (Application no. 6-513062)