A cubic isotropic X-ray dose detector diode fabricated by DRIE of SOI substrates

Author: 
Norlin, P., Öberg, O., Junique, S., Kaplan, W., Andersson, J. Y, Nilsson, G.
Type of publication: 
Journal article
Year: 
2014
Published in: 
Sensors and Actuators A, 213, 116-121