A CMOS-Compatible Device for Fluid Density Measurements Fabricated by Sacrificial Aluminum Etching

Author: 
David Westberg, Oliver Paul, Gert I. Andersson, Henry Baltes
Type of publication: 
Journal article
Year: 
1999
Published in: 
Sensors and Actuators, A-Physical, Vol. 73: (3), pp. 243-251, 1999