MEMS Inertial Sensors

The RISE Acreo staff is working with the development of high-end MEMS inertial sensors and has done so since 1992 and is one of the pioneers in the field. Innovator to the 3-axis Quad Slanted Beam MEMS accelerometer, the MEMS Butterfly™ gyro, and to the digital electronic gyro control algorithm architecture, that most manufactures of high-end MEMS gyros utilize today. The MEMS Inertial Sensor projects at Acreo are industrially financed and have always been so, therefore most of the generated results are confidential and the open public information is limited. However, below is a glimpse of the ongoing activities to provide a view of what we can offer within this field.

Today low performance 3-axis silicon MEMS accelerometers are used in many consumer products such as mobile phones and are produced in very high volumes. This is not the case for high performance accelerometers, they are normally only one-axis, not of silicon MEMS type and quite expensive. At Acreo we are developing high performance 3-axis silicon MEMS accelerometers according to the Quad Slanted Beam concept. Presently we develop an accelerometer adapted for geophysical prospecting. Challenges in this development are to achieve: An extremely low noise level (tenths of ng), a very high dynamic range and still keep the power consumption low. These requirements have forced us to be innovative regarding both sensor and electronics design.

Example of ongoing MEMS gyro activities are: We have recently together with one of the leading MEMS manufactures been involved in the design of next generation MEMS gyro sensors for automotive. Presently we develop next generation high performance MEMS gyro that will have an order of magnitude better performance than the best MEMS gyros today.

Acreo is also deeply involved in the development of the calibration and compensation algorithms for MEMS inertial sensors. We are in these projects building up an extensive knowledge of how by signal processing and smart algorithms get out the best of MEMS based rate packs and IMU´s. Knowledge that we reuse to optimize performance of low cost consumer IMU´s, when we work with application development based on these.