Labs & TestbedElectrum Laboratory

Electrum Laboratory

The Electrum Laboratory is a fully equipped semiconductor process laboratory, with complete and highly qualitative process lines for device research and fabrication of components in a wide variety of materials:

  • Silicon Carbide (4H, 3C)
  • Silicon (Silicon Germanium, Quantum Wells)
  • GaAs (and related materials, Quantum Wells, Quantum Dots)
  • Glass, polymers, PDMS

This semiconductor process laboratory with 1300 m2 of clean-room area for electronic, optoelectronic and MEMS processing is operated jointly by Acreo and the Royal Institute of Technology (KTH). Furthermore, the laboratory provides post-process equipment, including large-area flip-chip bonding, state-of-the-art material characterization and electrical measurement equipment, including automatic wafer probing.

The Electrum Laboratory is ISO9000 certified and is a part of Myfab – the Swedish micro- and nanofabrication network.

We offer

Commissioned research

Our research and development groups are willing to share competence and build new knowledge together with you in commissioned research and development projects. Access to the laboratory resources may be a part of the project.

Foundry services

We can perform the processing and characterization for you, as single measurements, individual process steps or a full process sequence to fabricate a device as a prototype or in a larger series.

Individual user access

As an individual user of our laboratories you will get all necessary training and guidance. Our education programs help you to make the most efficient usage of our facilities and enable you to qualify for using the tools on your own

Incubator

In our incubator your manufacturing or device idea is given the time and possibility to grow in a controlled manner. You get access to our infrastructure, equipment and personnel resources and you may rent space to place your own proprietary tools in the laboratory environment.

Electrum lab - Application examples

III/V Technology

Virtual line using GaAs or InP semiconductor materials for fabrication of devices like quantum well infrared photo detectors (QWIP), vertical cavity surface emitting lasers (VCSL) or spatial light modulators (SLM). IR sensor manufacturing is the main activity within this technology, fabricating commercially available components in small scale production.

Key equipment: GaAs and InP epitaxy tools, PECVD, dry etchers for III/V, and evaporators and sputters offering a variety of metallization schemes.

SiC Technology

This line includes processes for other types of wide bandgap semiconductor materials like GaN. SiC line is currently operating for 3, 4 and 6 inch substrates and is fabricating diodes and switches.

Key equipment: SiC epitaxy tool, Stepper Lithography and Ion Beam Sputtering.

Silicon Technology

Complete line for fabrication of Silicon MOS devices for special applications like sensors, nano-device research or material development.

Key equipment: Si/SiGe epitaxy tool, stepper lithography, Rapid Thermal Annealing and state of the art multi chamber tool for etching of poly-Si, dielectrics and metals.

MEMS Technology

Fabrication resources for both surface and bulk micro-machining in Silicon, quartz and glass. MEMS technology is used in several projects and applications like microfluidics, different types of biosensors or fabrication of passive optical components.

Key equipment: wafer bonder, mask aligner for contact lithography and RIE tools for deep etching of Si and SiO2.

Nano Technology

Development environment enabling device research in nanoscale. The main approach is to test existing processes on nanostructures to develop new technology. Results of these studies are going to be implemented in next generation devices.

Key equipment: UV-NIL aligner combined with other “traditional” tools.

Post Processing

Enables further steps towards system construction. Devices fabricated and tested on wafer level can be separately mounted as parts of the systems.

Key equipments dice saws, wafer cleaving tool, wire bonders and flipchip bonder.

Measurement Laboratories

Electrum Laboratory offers a very wide spectrum of analytical equipment for both material characterizations and electrical measurement of components.

Examples of available analytical methods are microscopy (optical, SEM and AFM), spectroscopy (SIMS) or diffraction (XRD). For electrical characterization of components on wafer level automatic probes stations are available together with different apparatus for both DC and high frequency measurements.

People

Mietek Bakowski
Prof/Senior Expert
+46 (0)70 781 77 60
mietek.bakowski [at] ri.se

Per Björk
Researcher
+46 (0)70 752 77 51
per.bjork [at] ri.se

Magnus Lindberg
Group Manager QLA
+46 (0)70 513 58 89
magnus.lindberg [at] ri.se

Reza Nikpars
Service Technician
+46 (0)70 772 77 54
Reza.Nikpars [at] ri.se

Teresita Qvarnström
SME Development
+46 707 87 7739
teresita.qvarnstrom [at] ri.se

Björn Samel
Department Manager
+46 (0)70 475 00 81
bjorn.samel [at] ri.se

Qin Wang
PhD/Senior Expert
+46 (0)70 772 78 38
qin.wang [at] ri.se

Olof Öberg
Development Engineer
+46 70 772 78 19
olof.oberg [at] ri.se

Publications
Projects

Completed projects

News
In media