Acreo MEMS Lab

Acreo is a well reputable MEMS design house, contracted by leading MEMS manufacturers, that offer custom MEMS design of sensors and actuators, including electronics, test and calibration routines for production. We are especially well known for our work on inertial MEMS sensors (gyros and accelerometers).

Micro-Electro-Mechanical Systems, or MEMS, is a technology that allows microfabrication of miniaturized mechanical and electro-mechanical elements i.e., devices and structures. Using MEMS, a vast number of microsensors have been demonstrated with performances exceeding those of their macroscale counterparts; temperature, pressure, inertial forces, chemical species, magnetic fields, radiation, etc.

MEMS technology has become a ‘standard tool’ for building microsensors for navigation and motion tracking based on inertial phenomena; RF micro switch; interdigital electrodes for various bio-chemical measurements; bio-array reaction vessel that can be sealed with magnetic particles, packaging and assembly of components by using anodic bonding of Si to glass, LTCC, etc.; pressure and stress sensors for bonding and packaging characterization.
MEMS Design, Protyping & Testing

For design we use software tools such as Comsol Multiphisics, Mathlab, Simulink, MathCad, Cadence, L-Edit, etc. For fabrication we use commercial foundries like Silex or advanced research clean room facilities such as the Electrum Laboratory - Nano- and Micro Technology Fab and the MC2 clean room at Chalmers. Acreo possess also very well equipped labs for MEMS sensor and system characterization and testing. Behavioural models must be confirmed with electrical or optical measurements often under the influence of mechanical stimuli. Our characterization labs are probably the most well equipped in Sweden for this task, with:

  • Semi-automatic “Karl Suss PA200-II semiconductor probstation” with optional optical profilometers.
  • Scanning laser doppler vibrometer “Polytec PSV-300-F” with vacuum chamber
  • Precision shaker “Bouch Labs Model 1000AD”
  • Rate table with 3 degrees of freedom “Ideal Aerosmith Model 1601-4-TL” with temerature chamber
  • Climate chamber “Heraes-Vötsch VCL 601
  • Electrical measurement instrumentation (Semiconductor parameter analyser, LCR-meters, Spectrum analysers, Waveform generators, Ocilloscopes, Sources, Amplifiers, etc.)

Calibration services

A prerequisite in achieving high accuracy and long navigation times is calibration of the inertial sensors and determination of their relative orientations. For this purpose, we have an automatic temperature controlled calibration station consisting of a rate table and all the necessary software. During the years we have built up an extensive knowledge about calibration and characterization a service that we now also offer for 3 party inertial sensors.



Gert Andersson
CTO Sensor Systems
+46 70 915 18 05
gert.andersson [at]

Peter Björkholm
+46 (0)70 915 18 09
peter.bjorkholm [at]

Anders Ericsson
Research Scientist
+46 72 577 92 22 [at]

Cristina Rusu
Senior Expert, Micro System technology
+46 (0)70 915 18 26
cristina.rusu [at]

Björn Samel
Department Manager
+46 (0)70 475 00 81
bjorn.samel [at]

Borys Stoew
Senior Scientist
+46 (0)70 915 18 15
borys.stoew [at]

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