Process Lab

The Electrum Laboratory is a fully equipped semiconductor process laboratory, with complete and highly qualitative process lines for device research and fabrication of components in a wide variety of materials:

• Silicon Carbide (4H, 3C)
• Silicon (Silicon Germanium, Quantum Wells)
• GaAs (and related materials, Quantum Wells, Quantum Dots)
• Glass, polymers, PDMS

This semiconductor process laboratory with 1300 m² of clean-room area for electronic, optoelectronic and MEMS processing is operated jointly by Acreo and the Royal Institute of Technology (KTH). Furthermore, the laboratory provides post-process equipment, including large-area flip-chip bonding, state-of-the-art material characterization and electrical measurement equipment, including automatic wafer probing.

The Electrum Laboratory is part of Myfab – the Swedish micro- and nanofabrication network.

Electrum lab - Application examples

III/V Technology

Virtual line using GaAs or InP semiconductor materials for fabrication of devices like quantum well infrared photo detectors (QWIP), vertical cavity surface emitting lasers (VCSL) or spatial light modulators (SLM). IR sensor manufacturing is the main activity within this technology, fabricating commercially available components in small scale production.

Key equipment: GaAs and InP epitaxy tools, PECVD, dry etchers for III/V, and evaporators and sputters offering a variety of metallization schemes.

SiC Technology

This line includes processes for other types of wide bandgap semiconductor materials like GaN. SiC line is currently operating for 3 and 4 inch substrates and is fabricating diodes and switches. 

Key equipment: SiC epitaxy tool, Direct Write Lithography and Ion Beam Sputtering.

Silicon Technology

Complete line for fabrication of Silicon MOS devices for special applications like sensors, nano-device research or material development.

Key equipment: Si/SiGe epitaxy tool, stepper lithography, Rapid Thermal Annealing and state of the art multi chamber tool for etching of poly-Si, dielectrics and metals.

MEMS Technology

Fabrication resources for both surface and bulk micro-machining in Silicon, quartz and glass. MEMS technology is used in several projects and applications like microfluidics, different types of biosensors or fabrication of passive optical components.

Key equipment: wafer bonder, mask aligner for contact lithography and RIE tools for deep etching of Si and SiO2.

Nano Technology

Development environment enabling device research in nanoscale. The main approach is to test existing processes on nanostructures to develop new technology. Results of these studies are going to be implemented in next generation devices.

Key equipment: UV-NIL aligner combined with other “traditional” tools.

Post Processing

Enables further steps towards system construction. Devices fabricated and tested on wafer level can be separately mounted as parts of the systems.

Key equipments dice saws, wafer cleaving tool, wire bonders and flipchip bonder.

Measurement Laboratories

Electrum Laboratory offers a very wide spectrum of analytical equipment for both material characterizations and electrical measurement of components.

Examples of available analytical methods are microscopy (optical, SEM and AFM), spectroscopy (SIMS) or diffraction (XRD). For electrical characterization of components on wafer level automatic probes stations are available together with different apparatus for both DC and high frequency measurements.