High precision distance sensing

High end clamping systems of System 3R International have an impressive precision of 0.5µm in their mechanical clamping mechanism.

By integrating an optical fiber into the steel chuck, the clamping system is enhanced even further by measuring the absolute position of the work piece within tens of nanometers. The machining process can be adjusted accordingly.

The fiber optic sensor consists of a broad-band light source, a spectrometer and optical fibers, one per channel. The fiber is embedded into the chuck. The absolute position of the work-piece in the machine chuck is determined by interferometry.

The low-cost fiber optic sensing enables efficient production of high precision components, such as high quality optical components, MEMS and micro machined parts for the demanding and fast-changing mobile phone market.

The system promise lower production costs, better quality, and a higher degree of automation.

About the project

Project objective: To develop a system that gives nanometer-precision positioning information in an industrial environment.

Project leader: Acreo.

Project members: Acreo, System 3R International, (Seco Tools)

Other: Project is carried out within Acreo Fiber Optic Center.

Publications: Sterner, C., Koch, R., Dahlquist, H., and Nilsson, L-E. "Macro sensor - Palletizing on submicron level". Euspen 9th Int Conf. of Precision Engineering and Nanotechnology 2009. San Sebastian, Spain. June 2009.

Acreo contact: Carola Sterner, carola.sterner(at)acreo.se, ph: +46 8 632 7765.